Rigaku Holdings Corporation (Headquarters: Akishima, Tokyo; President and CEO: Jun Kawakami; “Rigaku”), a global leader in X-ray analysis technologies, announced today that it has entered into a strategic equity and business partnership with Onto Innovation Inc. (Headquarters: Massachusetts, USA; CEO: Michael P. Plisinski; “Onto Innovation”).
“As semiconductor devices become increasingly complex—especially given the growing importance of three-dimensional structures—Rigaku is committed to enhancing its analytical capabilities by incorporating advanced model-based and AI-powered algorithms into optical metrology,” said Jun Kawakami, President and CEO of Rigaku Holdings Corporation. “Onto Innovation brings not only deep expertise in optics and software, but also capabilities in physical modeling for X-ray analysis, making the company an ideal partner for us.”
This alliance directly supports Rigaku’s core growth strategy in semiconductor process control. By combining Rigaku’s X-ray technologies with Onto Innovation’s complementary optical metrology and advanced analysis software, including AI-powered solutions, the companies aim to provide next-generation hybrid metrology solutions for increasingly complex semiconductor devices.
“The pace of change in semiconductor manufacturing is accelerating as the industry combines increasingly complex and sophisticated materials with new 3D transistor structures and advanced packaging technologies to realize 3D and 2.5D chiplet architectures,” said Michael P. Plisinski, CEO of Onto Innovation Inc. “These changes require new and innovative methods for measuring, characterizing, and ultimately controlling these new production technologies. We are excited to expand our partnership with Rigaku and together deliver the solutions our customers need to maintain their pace of innovation.”
The two companies are already collaborating on hybrid measurement solutions that integrate Rigaku’s CD-SAXS system into Onto Innovation’s analysis software. This new agreement will further accelerate and expand this joint development.
About Onto Innovation: Onto Innovation is a leading process control company, combining global reach with a comprehensive portfolio of cutting-edge technologies. These include quality inspection of unstructured wafers, 3D metrology for chip structures—from nanometer-scale transistors to large chip interconnects—macro-defect inspection of wafers and packages, metal compound composition analysis, factory analytics, and lithography for advanced semiconductor packaging. Headquartered in Wilmington, Massachusetts, Onto Innovation supports its customers with a worldwide sales and service organization. For more information, please visit https://ontoinnovation.com/
Strategic Highlights
- In line with its core growth strategy: Rigaku is strengthening its offering in the area of process control for the semiconductor industry, a key growth driver for the future.
- Technologies that complement each other perfectly: Rigaku’s X-ray solutions and Onto Innovation’s complementary optical and software engineering expertise offer strong synergies from which customers benefit through deeper insights into their processes.
- Well positioned for the changing industry structure: In response to increasingly demanding customer requirements and the growing complexity in semiconductor manufacturing
- Strengthening competitiveness: This transaction will allow Rigaku to further strengthen its competitive position in the field of process control for semiconductors.
Important initiatives
- Introduction of hybrid measurement technology for the front-end-of-line area: Improvement of measurement capabilities for modern logic and memory components through the combination of X-ray and optical technologies.
- Advanced packaging technologies for the automotive industry: Accelerating the entry into inspection and measurement applications in the field of advanced packaging technology
- Creating new markets: By 2030, Rigaku aims to unlock additional market opportunities worth at least US$300 million for its products.
- Integration of software and AI: Support in developing integrated solutions that include measurement, analysis, process optimization, and yield management.
- Global customer reach: Leveraging Onto Innovation’s global customer base to strengthen Rigaku’s market presence
Equity investment
Onto Innovation has entered into a definitive agreement to acquire 61,123,436 shares (27.0% of the shares outstanding as of March 31, 2026, excluding treasury shares) of Rigaku from Atom Investment, LP, thereby establishing a long-term strategic alliance between the two companies.
Corporate management
Rigaku will maintain its corporate independence as a publicly listed company. The agreement also includes provisions designed to ensure a stable, long-term partnership, including certain restrictions on the transfer of shares and further acquisitions.
Further details can be found in the ad hoc announcement published today, which is available on Rigaku’s website and the Tokyo Stock Exchange website.
About the Rigaku Group
Since its founding in 1951, the engineers of the Rigaku Group have been dedicated to helping society with cutting-edge technologies, particularly in the core areas of X-ray and thermal analysis. With a market presence in 136 countries and regions and approximately 2,000 employees in 9 global offices, Rigaku is a solutions partner for industry and research institutions. Our overseas sales share has reached approximately 70%, while we maintain an exceptionally high market share in Japan. Together with our customers, we continue to evolve and grow. As applications range from semiconductors, electronic materials, batteries, the environment, resources, energy, and life sciences to other high-tech fields, Rigaku realizes innovations under the motto “To Improve Our World by Powering New Perspectives.”
For more information, please visit rigaku-holdings.com/english
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